If the thickness of Pd deposited is larger than 9$AA$, its phase is $Pd_3Si$. This phase is followed by pure Pd phase with further deposition of Pd. Also, when the thickness of Pd deposited on top of Si(111) is larger than 1$AA$, the phase of Pd-silicide formed is found to be Pd2Si. The full width at half maximum of Pd 3d core-levels increases with decreasing of Pd film thickness at low coverages ($leq0.5AA$). This is due to the formation of additional phase of Pd silicide, i.e. PdSi, in addition to $Pd_2Si$.