To oxide film, $A1_2O_3,;Ta_2O_5$ and $ZrO_2$, coated on stainless steel (SUS410, SUS304) and pure Fe using RF magnetron sputtering method, the corrosion resistance on oxide coatings was studied using electrochemical measurement. Also, the adherence between film and substarte was studied. The adherence index ( $chi$ ) was determined by the measure of micro hardness test. In this paper, we know that oxide film coated on SUS304 have better corrosion resistance than that coated on SUS410. In oxide film, the difference of corrosion resistance due to crystal structure have not been showed. In evaluating defect area rate of ceramic coated materials, CPCD method can be used effectively. In the micro-hardness test, with $1{mu}m$ thickness film, it has only one the value of $chi$. Above $2{mu}m$ thickness film, however, get another value of $chi$ as the cracks in film. The oxide film adhere well on the mild materials such as pure steel than high intensity materials like stainless.