This paper describes the design processes and evaluation results of a small-sized six-axis force/torque sensor. The new six-axis force/torque sensor including S-type structure has been developed using a parallel plate structure as a basic sensing element. In order tominimize coupling errors, the location of strain gages has been determined based on the finite element analysis and the connections of strain gages have been made such that the bridge circuit with 4 strain gages becomes balanced. Several design modifications result in a similar strain sensitivity for six-axis forces and moments, and the reduced coupling errors of 2.6% FS between each forces and moments. Calibration test results show that the six-axis load cell developed which has light weight of 135g and the maximum capacities of 196 N in forces and 19.6 N.m in moments is estimated to be within 7.1% FS in coupling error.