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FeCoB계 아몰퍼스 자성박막의 인덕턴스의 주파수 의존성
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  • FeCoB계 아몰퍼스 자성박막의 인덕턴스의 주파수 의존성
저자명
신용진,소대화,김현욱,서강수,임재근
간행물명
전기전자재료학회논문지
권/호정보
1998년|11권 5호|pp.413-417 (5 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, we investigate frequency dependance of inductance of FeCoB amorphous magnetic films. $(Fe_{1-x}Co_x)_{79}Si_2B_{19}$ was used as the basic composition of amorphous magnetic film having near zero magnetostriction. The amorphous magnetic films were fabricated with x=0.94 and x=0.95 by using sputtering method at high frequency. The films were anneald under non-magnetic field and near crystallization temperatures(30min at $280^{circ}C$, 30min and 1hr at $400^{circ}C$, respectively). As the results of the experiments with the fabricated films, the lowest coercive force was 0.084[Oe] at 400[W] of the input power and the crystallization temperature was $360^{circ}C$ . In the case 30min at 40$0^{circ}C$ the inductance value in the low frequency with x=0.95 was higher by 488% than that with x=0.94. The quality factor Q was below 0.7 for all samples. We obtained the highest quality value at 400[KHz] with 30min at $280^{circ}C$ and x=0.94. The value was about 0.62. Also, the quality factor value was about 0.35 at 1[MHz] with 30min at $280^{circ}C$ and x=0.95.