- 박막 패턴의 레이저 리페어 연구
- ㆍ 저자명
- 강형식,홍성준,최종윤,홍순국,전태옥
- ㆍ 간행물명
- 한국레이저가공학회지
- ㆍ 권/호정보
- 1998년|1권 1호|pp.39-44 (6 pages)
- ㆍ 발행정보
- 한국레이저가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
Laser ablation system for microscopic defect in thin film pattern was developed in this study. For the varification of this study, several laser ablation tests were accomplished. The ablated shape of thin film and the surface of base glass were analyzed by use of microscopic tools and EPMA. After some tests of thin film, the specification of laser and optical unit(max. laser energy is 25mJ, wavelength is 532nm, Q-switched Nd-YAG laser, frequency is 20Hz, Auto-focus unit is LD type.)