Diamond shaping is one of the machining strategies to make the optical micro-groove molds, and it is especially useful when the component is an assembly of the linear micro-groove array. A mirrorlike surface and an arbitrary crose-sectional curve can be easily made by the diamond tool. However, the cutting speed of shaping is relatively lower than that of the other cutting methods, and there exist an unstable cutting conditions that generate the chatter. This study is focused on the modeling of the simplified self-induced chatter of the diamond shaping, and the machinabilities of three materials are compared by cutting experiments. From the chatter model and experiments, it is found that the unstable cutting conditions exist when the depth of cut is low and cutting speed is high. It is also found that the brass is relatively good material in micro shaping than copper or aluminium from the cutting experiments.