Tin oxide films deposited by spray pyrolysis have defects and preferred orientations according to the temperature of substrate. The growth of crystalline deposits began at the substrate temperature of $300^{circ}C$. With increasing substrate temperature the plane (200) groved preferentially and above $400^{circ}C$, planes of higher indices. Grain size increased with increasing substrate temperature up to $400^{circ}C$. Undoped film is composed of Sn and O, and contains oxygen vacancies. Film doped with antimony has defects such as oxygen vacancies, antimony substituted on Sn and chlorine on oxygen.