- 고주파 가열기를 이용한 PZT와 연결기판의 접합기술
- ㆍ 저자명
- 이종현,최시영,Lee. Jong-Hyun,Choi. Sie-Young
- ㆍ 간행물명
- 센서학회지
- ㆍ 권/호정보
- 1999년|8권 1호|pp.89-94 (6 pages)
- ㆍ 발행정보
- 한국센서학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
In this study, a new technology to bond the PZT with connection board, which is a core technology for the fabrication of medical micro high frequency sensors, was developed. Two technologies were adopted. One is bonding of In using thermal heating, he other is bonding of Pb using a high frequency heating machine. In case of thermal eating, bonding was failed because of the contaminations of In surface. But, when using high frequency healing machine, we developed good bonding characteristics at various experimental conditions and thickness of the electrode material.