Recently the ozone generation system is well used for cleaning the contaminated water by using the strong oxidization effects of ozone. In this paper the concentration, yield and generation quantity of the ozone by the Surface-Silent Discharge According to the Length of Coaxial Electrode is described. The electrodes composed of 3 electrodes-2 gaps are coaxial type and the ozone generation tube were designed and fabricated from the point of view of the energy efficiency, stability and easy control. To investigate the ozone generation dependency on electrode length, a few discharge tubes with different lengths were fabricated. The experimental equipments were provided with cooling system and dehumidifier for the many testing conditions. The main results show that the concentration, yield and generation quantity of ozone are improved by decreasing gas temperatures and increasing electrode lengths.