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Effect of hydrogen plasma treatment on the photoconductivity of free-standing diamond film
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  • Effect of hydrogen plasma treatment on the photoconductivity of free-standing diamond film
  • Effect of hydrogen plasma treatment on the photoconductivity of free-standing diamond film
저자명
Kim. Sung-Hoon
간행물명
한국결정성장학회지
권/호정보
1999년|9권 4호|pp.441-445 (5 pages)
발행정보
한국결정성장학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Thick diamond film having $~700mu extrm{m}$ thickness was deposited on polycrystalline molybdenum(Mo) substrate using high power (4 kW) microwave plasma-enhanced chemical vapor depostion (MPECVD) system. We could achieve free-standing diamond film via detaching as-deposited diamond film from the substrate by rapid cooling them under vacuum. We investigated the variation of photoconductivity after exposing the film surface to either oxygen or hydrogen plasma. At as-grown state, the growth side (the as-grown surface of the film) showed noticeable photoconcuctivity. The oxygen plasma treatment of this side led to the insulator. After exposing the film surface to hydrogen plasma, on the other hand, we could observe the reappearing of photoconductivity at the growth side. Based on these results, we suggest that the hydrogen plasma treatment may enhance the photoconductivity of free-standing diamond film.