- 화학기상증착 다이아몬드 막의 레이저 평탄화
- ㆍ 저자명
- 박영준,백영준
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1999년|36권 4호|pp.417-424 (8 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Laser lapping of diamond films is performed with focused beam of copper vapor laser. Both spherical and rod-shape laser beam are used. Diamond surface is scanned at various scan speeds(0,125, 0.5, 0.75 mm/sec) and baem shifts (5, 10, 20, 40, 100$mu extrm{m}$) At 0.125 mm/sec 10$mu extrm{m}$ scan condition the level difference of di-amond surface of about 700$mu extrm{m}$ over 20 mm is reduced to 200$mu extrm{m}$ In addition surface roughness is also im-proved from 3.53$mu extrm{m}$ to 2.47$mu extrm{m}$ at 5$mu extrm{m}$ beam shift. But at higher beam shift than 10$mu extrm{m}$ laser scan makes the surface rougher which is considered to be due to the non uniform spatial distribution of laser en-ergy. It is concluded that homogenized laser beam with high average power is needed for large area laser lapping of diamond films at appreciable rates.