- 열처리 조건에 따른 $alpha-Fe_2O_3/SnO_2$계 박막형 가스센서의 제조 및 특성평가
- ㆍ 저자명
- 김찬원,심성은,최성철
- ㆍ 간행물명
- 요업학회지
- ㆍ 권/호정보
- 1999년|36권 11호|pp.1156-1162 (7 pages)
- ㆍ 발행정보
- 한국세라믹학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
$alpha$-Fe2O3/SnO2 multi-layer thin films were fabricated by APCVD(Atmosperic Pressure Cehmical Vapour Deposition) and annealed at 40$0^{circ}C$ or 4 h, Diffusion of metal ions at the boundary of $alpha$-Fe2O3 and SnO2 layers was analyzed by SEM. EDS and XRD. The crystallite size of SnO2 was affected by the deposition temperature and time. The gas sensitivity (Rg/Ra) of $alpha$-Fe2O3/SnO2 multi-layer thin film gas sensor for NO gas contents of 100 ppm and 1000ppm was 6 and 14 respectively and the response time was 10 sec, The gas sensitivity of thin film gas sensor was improved by multi-layer process