This paper describes resonant mode selection with which the relative permittivity can be measured exactly. To measure the relative permittivity, a circular cylindrical cavity filled with dielectric material is used. When the circular cylindrical cavity is filled with the dielectric material, the air gap occurs on account of machining error. Accurate relative permittivity can be obtained by using less sensitive mode in resonant frequency variation by the air gap. As a result, Average 0.009% resonant frequency variation in the vertical and the radial direction appears at $TE_{011}$ mode. It is interesting that the frequency variation by the air gap at $TE_{011}$ mode turns out to be the least sensitive.