- 후속 열처리에 따른 Pt/SBT/Pt 캐패시터의 강유전 특성과 누설전류 특성
- ㆍ 저자명
- 권용욱,박주동,연대중,오태성
- ㆍ 간행물명
- 韓國眞空學會誌
- ㆍ 권/호정보
- 1999년|8권 |pp.238-244 (7 pages)
- ㆍ 발행정보
- 한국진공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Pt/SBT/Pt capacitors were fabricated using the MOD-derived $SrBi_{2x}Ta_2O_9$ (SBT) films and their ferroelectic and leakage current characteristics were investigated with post annealing at 400~$800^{circ}C$. Although the MOD-derived SBT film exhibited the hysteresis loop typical for the leaky film, the well-saturated ferroelectric hysteresis loop could be obtained by post annealing the Pt/SBT/Pt capacitors at $550^{circ}C$~$800^{circ}C$. The remanent polarization $2P_r$ of the SBT film exhibited a maximum value of 9.72$mu extrm{cm}^2$ with post annealing at $600^{circ}C$, and then decreased with increasing the post annealing temperature above $600^{circ}C$. The MOD-derived SBT films exhibited the high leakage current density of ~$10^{-3} extrm{A/cm}^2$ at 75kV/cm. With post annealing the Pt/SBT/Pt capacitor at 600~$800^{circ}C$, however, the leakage current density decreased remarkably to less than $10^{-6} extrm{A/cm}^2$ at 75kV/cm.