Recently the necessity of MMIC is increasing because clock frequency goes up by digital data transmission of Gbps class being demanded and the density of circuits gets high for the purpose of lightening and miniaturizing system, owing to the development of ultra high speed. When massing lines in a MMIC and super high speed integrated circuit cause the crosstalk and dispersion of signal, a digital signal is distorted and EMI is occurred. To solve this problems, It is necessary to analyze the equivalent parameters of transmission lines. This paper represent the results of the equivalent parameters of transmission lines for single and hi-level structure by using moment method.