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EFFECTS OF AMINES ON COPPER ETCHING WITH H$_2$SO$_4$-$H_2O$$_2$ SYSTEMS
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  • EFFECTS OF AMINES ON COPPER ETCHING WITH H$_2$SO$_4$-$H_2O$$_2$ SYSTEMS
  • EFFECTS OF AMINES ON COPPER ETCHING WITH H$_2$SO$_4$-$H_2O$$_2$ SYSTEMS
저자명
Kobayashi. Katsuyoshi,Minami. Naoki,Chiba. Atsushi
간행물명
한국표면공학회지
권/호정보
1999년|32권 3호|pp.377-384 (8 pages)
발행정보
한국표면공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The corrosion of copper in $H_2$$SO_4$ $-H_2$$O_2$ etching solutions with amines was investigated at various flow rates (v). Amine additives give a retardation of $H_2$$O_2$ decompositions, increases in both corrosion rates and etch factor, and a protection of etched copper surfaces. However n-alkylamine additives acted as corrosion inhibitors at v < 10cm/s, those acted as corrosion accelerators at v of 10-220cm/s. The maximum corrosion rate was obtained with about 0.1 molal concentration of additives. Steric effects of substituted groups suppressed the acceleration of copper corrosion. The increases in both corrosion rates and flow rates gave the increase in etch factor. Corrosion rates with n-alkylamine increased in the order of ethylamine < n-propylamine < n-butylamine, those with butylamine isomers tert- < sec- < iso- < n-butylamine, and those with amine additives of different number of substituted groups tri- < di- < mono-n-propylamine, respectively.