- 마스크에 대한 기계적 가공을 이용한 단결정 실리콘의 미세 패턴 가공
- ㆍ 저자명
- 진원혁,김대은,Jin. Won-Hyeog,Kim. Dae-Eun
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 1999년|16권 2호|pp.60-67 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Micro-fabrication techniques such as lithography and LIGA processes usually require large investment and are suitable for mass production. Therefore, there is a need for a new micro-fabrication technique that is flexible and more cost effective. In this paper a novel, economical and flexible method of producing micro-pattern on silicon wafer is presented. This method relies on selective removal of mask by mechanical cutting. Then micro-pattern is produced by chemical etching. V-shaped grooved of about 3 ${mu}m$ wide and 2 ${mu}m$ deep has been made on ${SiO_2}m$ coated silicon wafer with this method. This method may be utilized for making microstructures in MEMS application at low cost.