Densification behavior of titanium alloy powder was investigated under hot isostatic pressing at various pressures and temperatures. Uniaxial creep responses of a dense specimen were also obtained at high temperatures. The densification model of Abouaf and co-workers was implemented into a Finite element program (ABAQUS) to compare with experimental data for titanium alloy powder. The agreements between finite element calculations and experimental data for deformation and densification of titanium alloy powder were good during hot isostatic pressing,