Recently, force measurement systems are commonly used in many industrial fields and the precision of the measurement system is getting more important as the industry needs more precise tools and in struments to make high quality products. However, a high precision force measurement system is hard to make unless we know precisely the causes, quality and quantity of measurement errors in advance. In this work, many possible mechanical causes of measurement errors are reviewed including ratio of length to diameter of sensing part, radius of contact area, radius of bearing part, ratio of material properties and change of boundary conditions. Also, the measurement errors are analyzed by nonlinear finite element method and the nonlinear behavior of the errors are investigated. The results can be used to design force measurement systems and expected to be very useful especially for compact type load cells.