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Isolation and Characterization of Biofouling Bacteria in Ultra-high Purity Water Used in the Semiconductor Manufacturing Process
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  • Isolation and Characterization of Biofouling Bacteria in Ultra-high Purity Water Used in the Semiconductor Manufacturing Process
  • Isolation and Characterization of Biofouling Bacteria in Ultra-high Purity Water Used in the Semiconductor Manufacturing Process
저자명
Kim. In-Seop,Lee. Kye-Joon
간행물명
Journal of microbiology and biotechnology
권/호정보
2000년|10권 4호|pp.554-558 (5 pages)
발행정보
한국미생물생명공학회
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Bacteria were isolated and identified from an advanced high-purity water system that supplies ultra-high purity water (UHPW) for 16-megabyte DRAM semiconductor manufacturing. Scanning electron microscopic and microbiological observations revealed that the primary source of the bacteria isolated from the UHPW was detached cells from biofilms developed on the pipe wall through which the UHPW, a man-made and extremely nutrient poor environment, was passing. About 63-65% of the bacteria isolated from the UHPW and the pipe wall were Gram-positive, whereas only 10% of the bacteria isolated from the feed water were Gram-positive. The of Gram-positive bacteria and seven genera of Gram-negative bacteria. Strains of the UHPW bacteria effectively adhered to and formed a biofilm on the surface of polyvinyl chloride (PVC) pipe.