- MEMS 기술을 이용한 수은방울경사각센서 개발
- ㆍ 저자명
- 오종현,오동영,이승섭,Oh. Jong-Hyun,Oh. Dong-Young,Lee. Seung S.
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2000년|17권 8호|pp.120-125 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper proposes a tilt sensor made by MEMS technology. The sensor consists of an electrode glass a small mercury drop a circular channel and a cover glass. The mercury drop is used as medium of a current flow and in contact with two circular chromel electrodes used as an angular-motion resistance When this sensor inclines the mercury drop inside the circular channel moves into the bottom under the influence of gravity. A tilt angle can be measured by changed resistance as tilting this sensor, This sensor has a linear section between +50.$^{circ}$ and -50.$^{circ}$ with the accuracy of 2.$^{circ}$. We are also studying about the enlargement of the linear section and the effect of the size of the mercury drop