- LIGA 공정을 이용한 삼면반사체 제작
- ㆍ 저자명
- 오동영,정동관,박노열,장석상,이승섭,Oh. Dong-Young,Jung. Dong-Kwan,Park. Noh Y.,Chang. Suk-Sang,Lee. Seung-Seop
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2000년|17권 8호|pp.172-179 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper a technology for the fabrication of the oblique structure using the LIGA process will be presented. The fabricated microstructure is a tetrahedral 3- facet mirror. The mirror has an equilateral triangular base of hundreds ${mu}m$ length mirror-like three side-facets inclined to the base at 45$^{circ}$ and knife edges. Two regular triangles of 45$^{circ}$ and tan-12. After development the shaded part of the PMMA the tetrahedral mirror remains, The completed mirror shows excellent aspects of mirror-like facets and knife-edges. By controlling the gap between the mask and the substrate the size of mirror easily can be changed. This mirror would be used as a laser beam splitter for the feedback control of the HDD slider.