In this paper the concentration, yield and generation quantity of the ozone by the superposition discharge according to the coaxial electrodes geometry is described. In order to improve the ozone generation, a new type of ozonizer is proposed, where a silent discharge and a surface discharge are generated in the separated discharge spaces at the same time. To investigate the ozone generation dependency on electrode geometry, a few discharge tubes with different geometry were fabricated. In our experiment, the 60[Hz] one phase voltage is applied to the discharge tube which has three electrodes. And three kinds of discharges, two silent discharges and a surface discharge are superposed in the same space of the ozonizer. As a result, the followings are obvious. When two kinds of discharges are superposed under the condition using 3 electrode-3gap discharge tube, the maximum ozone efficiency is obtained.