- 교류형 플라즈마 디스플레이용 MgO 박막의 조성변화에 따른 방전전압특성의 영향
- ㆍ 저자명
- 손충용,조진희,김락환,김정열,박종완
- ㆍ 간행물명
- 韓國眞空學會誌
- ㆍ 권/호정보
- 2000년|9권 1호|pp.24-29 (6 pages)
- ㆍ 발행정보
- 한국진공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
MgO thin films were deposited on soda lime glass substrates by rf magnetron sputtering using a MgO target at various oxygen flow ratios in order to probe the relationship between MgO film properties and discharge characteristics. MgO films have a tendency to form microstructures with a preferred growth orientation of (200) with increasing oxygen flo ration up to 0.1 $O_2$/(Ar+$O_2$). MgO film obtained at 0.1[$O_2$/(Ar+$O_2$)] was found to be fully stoichiometric. The stoichiometric MgO film was observed to have relatively very clean surface and grains of large size and contain almost no hydroxyl group. The AC PDP with fully stoichiometric MgO film showed lower firing and sustain voltages than those with magnesium-rich or oxygen-rich MgO films, being largely attributed to the larger grain size and the minimized hydroxyl group.