Mechanical performances of beam shaped and bridge-shaped conductive polymer actuator have been measured and analyzed varying polymerization conditions and operating conditions such as applied current, polymerizing time, frequency of the current and kinds of electrolytes. For the application of conductive polymer actuator to micropump, the diaphragm structure has been fabricated, which is composed of polypyrrole, solid polymer electrolyte and parylene. Measured results how the possibility of the practical application of conductive polymer actuator.