The sensitivity analysis of two short-term models (ISCST3, INPUFF2.5) is performed to improve the model accuracy. It appears that the sensitivities on the changes of wind speed, stack height and stack inner diameter in the near distance from source, stability and mixing height in the remote distance form source, are significant. Also the gas exit velocity, stack inner diameter, gas temperature and air temperature which affect the plume rise have some effects on the concentration values of each model within the downwind distance where final plume rise is determined. And in modeling for the atmospheric dispersion of point pollutant source INPUFF2.5 can calculate amount, trajectory of puff and concentration versus time at each receptors. So, it is compatible to analyze distribution of point pollutants concentration at modeling area.