- 수직자기기록매체용 Co-Cr 박막의 자기적 특성 개선에 관한 연구
- ㆍ 저자명
- 공석현,금민종,최형욱,최동진,김경환,손인환
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2000년|13권 5호|pp.444-450 (7 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We prepared Co-Cr thin film for perpendicular magnetic recording media with facing targets sputtering system(FTS system) which can deposit a high quality thin film in plasma-free state and wide range of working pressure. The effect of sputtering conditions(argon gas pressure and substrate temperature) on the magnetic and the crystallographic characteristic of Co-Cr thin film was investigated. And the variation of perpendicular coercivity with the variation of film thickness was studied. As a result we obtained the high perpendicular coercivity of 1900Oe and the good dispersion angle of c-axis($Delta$$ heta$$_{50}$) of 5$^{circ}$on the film thickness of 100nm for the promising recording layer of perpendicular magnetic recording media.c recording media.a.