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Stress Determination in Epitaxial Lead Titanate Films by Asymmetric X-ray Diffraction Method
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  • Stress Determination in Epitaxial Lead Titanate Films by Asymmetric X-ray Diffraction Method
  • Stress Determination in Epitaxial Lead Titanate Films by Asymmetric X-ray Diffraction Method
저자명
Uchida. Hiroshi,Kiguchi. Takanori,Wakiya. Naoki,Shinozaki. Kazuo,Mizutani. Nobuyasu
간행물명
The Korean journal of ceramics
권/호정보
2000년|6권 4호|pp.385-389 (5 pages)
발행정보
한국세라믹학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Residual stresses in epitaxial films were measured by X-ray diffraction method. Lattice strains of the (hkl) planes measured along particular Ψ-angles were converted to the in-plane stress according to the equation of stress-strain tensor conversion. Residual tensile stresses were observed in epitaxial PbTiO$_3$ films deposited on (100) SrTiO$_3$ substrate. Tensile stresses approximately 0.9 GPa were measured in Pb-rich films, while it increased to approximately 2.0 GPa with the decreasing of Pb content in the case of Pb-poor films, which ascribed to the formation of lead and oxygen vacancies (expressed as x in Pb$_1-x$TiO$_3-x$).