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Ferroelectric Properties and Comparison between $PZT/IrO_2$ and PZT/Ir
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  • Ferroelectric Properties and Comparison between $PZT/IrO_2$ and PZT/Ir
  • Ferroelectric Properties and Comparison between $PZT/IrO_2$ and PZT/Ir
저자명
Jeon. Min-Seok,Lee. Hee-Soo,Kim. Il-Doo,Park. Duck-Kyun
간행물명
The Korean journal of ceramics
권/호정보
2000년|6권 1호|pp.64-67 (4 pages)
발행정보
한국세라믹학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Reactively sputtered $Pb(Zr,Ti)O_3$(PZT) films on $IrO_2$and Ir were evaluated with particular consideration on interface properties. The $IrO_2$and Ir were previously annealed at $650^{circ}C$ in $O_2$or $N_2$atmosphere, respectively. There was no appreciable roughening in the interface of the $PZT/IrO_2$respective to that of the PZT/Ir; the rms roughness of $IrO_2$and Ir was about 3nm and 10nm, respectively. The ferroelectric properties of the $PZT/IrO_2$were found to be better than that of the PZT/Ir; however, the leakage current of the $PZT/IrO_2$was slightly larger than that of the PZT/Ir. The $PZT/IrO_2$thin films did not exhibit any fatigue up to $10^{11}$ cycles; the $P^*;_r-P^r$ value decreased only from 16.6 to 14$mu$C/$ extrm{cm}^2$ until $10^{12}$ polarization reversals. On the other hand, although thin $IrO_2$layer was formed between PZT and Ir, the PZT/Ir thin films began to undergo fatigue after $10^9$ polarization reversals.