A performance-based design of smoke management systems for semiconductor fabrication facilities is described in this paper. The example of one such facility is discussed. Performance criteria for smoke control systems were established, effective smoke removal system features were identified and optimal system exhaust capacity requirements were developed by applying engineering tools including Fire Dynamic Simulator model. Considering the fact that the absence of relevant design guide, codes for consensus standards for semiconductor smoke design in Korea and United States this performance based approach can and should be applied to other fabrication facilities designs.