- DSMC법을 이용한 터보분자펌프 다단 익렬의 2차원 유동장 해석
- ㆍ 저자명
- 황영규,허중식,박종윤
- ㆍ 간행물명
- 空氣 調和·冷凍 工學 論文集
- ㆍ 권/호정보
- 2000년|12권 1호|pp.83-94 (12 pages)
- ㆍ 발행정보
- 대한설비공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The performance of a turbomolecular pump(TMP) in both molecular and transition flow regions is predicted by the numerical solutions of the Boltzmann equation obtained by the direct simulation Monte Carlo method. The compression characteristics of the TMP are investigated for a wide range of the Knudsen number( Kn ). The maximum compression ratios strongly depend on Kn in transition region, while do they weakly on Kn in free molecular flow region. The present numerical results of the single blade row in both molecular and transition regions are used to predict the overall performance of a TMP, which has three kinds of blade with 24-rows.