The scheduling rule for the fabrication process of the semiconductor manufacturing is suggested and tested on the simulation system which was developed based on the model to represent the main characteristics of wafer flows. The proper scheduling policies are necessary to meet the order change in the supply chain management. It was shown that the suggested rules which consider the wafer balance and the due date of the order, give good performances for the cycle time reduction and the rate of meeting due date as well. Also they are robust in the sense that performances are stable regardless of the order change rate and the input policies.