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La초기 화합물과 기판의 형태가 (P $b_{0.92}$ L $a_{0.05}$)Ti $O_3$ 박막의 치밀화 거동에 미치는 영향
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  • La초기 화합물과 기판의 형태가 (P $b_{0.92}$ L $a_{0.05}$)Ti $O_3$ 박막의 치밀화 거동에 미치는 영향
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간행물명
한국표면공학회지
권/호정보
2000년|33권 2호|pp.77-86 (10 pages)
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한국표면공학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this study effects of La starting compounds and substrates on the densification of (P $b_{0.92}$L $a_{0.05}$)Ti $O_3$ thin films were investigated. After the heat treatment on platinized silicon at $650^{circ}C$ for 30min thickness of PLT(i) thin films (from La-isopropoxide) shrank by 27%, while 33% reduction occurred for PLT (a) thin films (from La-acetate). These PLT(i) films showed less densified surface microstructure compared to the PLT (a) . Lower shrinkage of the films on platinized silicon than on bare silicon (41% and 40% for PLT (i) and PLT (a) respectively) is attributed to the earlier development of crystallinity in the film, which arrests film densification. In order to maximize sintering before crystallization, heat treatment at $400^{circ}C$ for 3 hours followed by $650^{circ}C$ for 30 min was attempted. This method increased the shrinkage of the PLT (i) and PLT (a) films two times and 1.5 times as much as that observed for the films heat treated at $650^{circ}C$ for 30min, respectively. FTIR results indicated that first pyrolysis in the film is associated with the burning of acetate ligands. Condensation reaction between OHs was found to occur preferentially between $350^{circ}C$ and $450^{circ}C$, whereas majority of polycondensation between ROH-OH appears to occur until $300^{circ}C$ and be completed below $450^{circ}C$.EX>.