Fluorinated polyimides with high thermal stability, low optical absorption loss in the optical communication wavelengths of 1.3 and 1.55㎛, and low birefringence and water absorption have been investigated for optical waveguide applications. These polyimides were prepared from 2,2-bis(3,4-dicar-boxyphenyl) hexafluoropropane dianhydride (6FDA) with 1,4-bis-(4-amino-2-trifluoromethyl-phenoxy) tetrafluorobenzene (ATPT) , 1,4-bis-(4-amino-2-trifluoromethyl-phenoxy) benzene (ATPB) , and 1,3-bis-(4-amino-2-trifluoromethyl-phenoxy ) 4,6-dichlorobenzene (ATPD ), respectively. The polyimides obtained had glass transition temperatures that ranged from 260 to 280$^{C}$, and low water absorption less than 0.4% and low optical loss (> 0.2 dB/cm) at 1.3 and 1.55㎛. Birefringency values of polymer films ranged from 0.0041 to 0.0066.