N-IR spectroscopy technology is very useful. And, the technology has wide application range. In the range, we know that single beam type silica analyzer has some handicap. So we were studied Splitted beam type silica analyzer. This dissertation have been discuss about system structure, system fundamentals and performance test. At the test, we were study in the spectral interference of NH3. We know that existing system had some problem. It is structural frailties of single beam type. Therefore we were study for Splitted beam type structure. And we obtain a good result. We have $pm$5% accuracy and 0.5 ppb level measuring range. But, we have a question. It is ppt level measuring technology by the laser beam spectroscopy.