- 전해 프로세스를 이용한 미세축 제작
- ㆍ 저자명
- 임영모,임형준,김수현,Lim. Young-Mo,Lim. Hyung-Jun,Kim. Soo-Hyun
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2001년|18권 3호|pp.169-174 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
We proposed a new fabrication method using electrochemical process for microshafts. This method is a kind of atomic removal process by chemical reaction. Therefore, it is possible to make thin and long shafts regardless of the stiffness of materials. Because shaping process is simply switched to polishing process by varying process conditions, we can precisely fabricate microshafts with very smooth surface. We also fabricated a very thin shaft with the diameter as small as 10$mu$m and a microshaft with high aspect ratio.