The machining accuracy is affected by geometric, volumetric errors of the machine tools. To improve the product quality, we need to enhance the machining accuracy of the machine tools. To this point of view, measurement and inspection of finished part as error analysis of machine tools ahas been studied for last several decades. This paper suggests the enhancement method of machining accuracy for precision machining of high quality metal reflection mirror or optics lens, etc. In this paper, we study 1) the compensation of linear pitch error with NC controller compensation function using laser interferometer measurement, 2) the method for enhancing the accuracy of NC milling machining by modeling and compensation of volumetric error, 3) the spherical surface manufacturing by modeling and compensation of volumetric error of the machine tool, 4) the system development of OMM without detaching work piece from a bed of machine tool after working, 5) the generation of the finished part profile by OMM. Furthermore, the output of OMM is compared with that of CMM, and verified the feasibility of the measurement system.