Decomposition of trichloroethlyene(TCE) in electron beam irradiation was examined on order to obtain information on the treatment of VOC in air. Air containing vaporized TCE has been studied in a flow reactor with different reaction environments, at various initial TCE concentration and in the presence and absence of water vapor. Maximum decomposition was observed in oxygen reaction environment and the degree of decomposition was about 99% at 20kGy for 2,000ppm initial TCE. The concentration of TCE exponentially decreased with dose in air and pure oxygen. The effect of water vapor on TCE decomposition efficiency was examined. The decomposition rate of TCE in the presence of water vapor (5,600 ppm) was approximately 10% higher than that in the absence of water vapor. Dichloroacetic acid, dichloroacethyl chloride and dichloroethyl ester acid were identified as primary products of this reaction adn were decomposed and oxidized to yield CO and $CO_2$. Perchloroethylene, hexachloroethane, chloroform and carbon tetrachloride were also observed as highly chlorinat-ed by products.