In this paper, the vector finite elements are adopted to calculate eigenvalues of RF and microwave components. Simulation results show that spurious are completely avoided because of the divergence free nature of the vector elements. This paper seeks to extend these low-order elements to higher orders to improve the accuracy of numerical solution. Investigation of numerical results for a rectangular waveguide was provided. A vector finite element program was implemented to allow propagation constants and electric field distributions to be directly computed in the rectangular and circular waveguides which are partially filled with the dielectric.