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Growth rate and growth steps of 6H-SiC single crystals in the sublimation process
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  • Growth rate and growth steps of 6H-SiC single crystals in the sublimation process
  • Growth rate and growth steps of 6H-SiC single crystals in the sublimation process
저자명
Kang. Seung-Min,Lim. Chang-Sung,Auh. Keun-Ho
간행물명
한국결정성장학회지
권/호정보
2001년|11권 4호|pp.166-169 (4 pages)
발행정보
한국결정성장학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

6H-SiC bulk crystals were grown by sublimation method with different conditions in term of gaseous pressures ad source temperatures. In order to optimize the growth rate, pressure at growth period and source and substrate temperatures were investigated as experimental variables. the results were compared with each other and finally the optimum growth conditions were discussed. Furthermore the relation of the growth steps and defects formation was evaluates in the point of reducing the micropipes. Subsequently the growth steps and defects formation was evaluated in the point of reducing the micropipes. Subsequently the growth steps were observed leading to the lower step height with the lower growth rate.