- RF 마그네트론 스퍼터링법에 의한 SBT 박막의 강유전체 특성
- ㆍ 저자명
- 조춘남,김진사,최운식,박용필,김충혁
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2001년|14권 9호|pp.731-735 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
S $r_{0.89}$B $i_{2.4}$T $a_2$ $O_{9}$ (SBT) thin films are deposited on Pt-coated electrode(Pt/Ti $O_2$/ $SiO_2$/Si) using RF magnetron sputtering method. In the XRD pattern, the SBT thin films had (105) orientation. As annealing temperature was increased from $600^{circ}C$ to 85$0^{circ}C$, the intensities of peak were increased. In the SEM images, Bi-layered perovskite phase was crystallized above $650^{circ}C$ and rod-like grains grew above 75$0^{circ}C$. The maximum remanent polarization and the coercive electric field at annealing temperature of 75$0^{circ}C$ are 11.60$mu$C/$ extrm{cm}^2$ and 48kV/cm respectively. The dielectric constant and leakage current density at annealing temperature of 75$0^{circ}C$ are 213 and 1.01x10$^{-8}$ A/$ extrm{cm}^2$, respectively. The fatigue characteristics of SBT thin filmsdid not change up to 10$^{10}$ switching cycles.s.s.