- $SF_6$-Ar 혼합기체에서의 전리와부착계수
- ㆍ 저자명
- 김상남,하성철
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2001년|14권 9호|pp.773-778 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this dissertation the results of the combined experimental and theoretical studies designed to understand and predict the spatial growth and transport coefficients for electrons in SF$_{6}$ and SF$_{6}$-Ar mixtures have described. The ionization and attachment coefficients in pure SF$_{6}$ and SF$_{6}$-Ar mixtures have been calculated over the range of 10<E/N<600Td by the two term Boltzmann equation and by the Monte Carlo Simulation using a set of electron collision cross sections for SF$_{6}$ molecule and for Ar atom proposed by other authors. The transport coefficients for electrons in (0.2%)SF$_{6}$-Ar and (0.5%)SF$_{6}$-Ar mixtures were measured by time-of-flight method, and the electron energy distribution function and the parameters of the velocity and the diffusion were determined by the variation of the collision cross-sections with energy. The results obtained in this work will provide valuable information on the fundamental haviors of electrons in weakly ionized gases and the role of electron attachment in the choice of better gases and unitary gas dielectrics or electro negative components in dielectric gas mixtures. gas mixtures.