Ti-37.5at%Si elemental powder mixtures were mechanically alloyed by a high-energy ball mill, followed by CIP (cold isostatic pressing) and HIP (hot isostatic pressing) for different processing conditions. Only elemental phases (Ti and Si) were observed for the 5 min mechanically alloyed (MA 5 min) powder, but only $Ti_5Si_3$phase was observed for the 30 min mechanically alloyed (MA 30 min) powder. $Ti_5Si_3$phase was observed for the HIPed compact of MA 5 min and 30 min powders at 150 and 190 MPa for 3 hr at $1000^{circ}C$. For the HIPed compacts, the highest sintered density was obtained to be 99.5% of theoretical density by a HIP step at $1350^{circ}C$ at 190MPa for 3hr. The hardness values of the HIPed $Ti_5Si_3$compacts at $1350^{circ}C$ at 150/190 MPa for 3hr were higher than HRC 76. The densification and mechanical property of HIPed $Ti_5Si_3$compacts was found to depend on more HIP temperature than HIP pressure.