- P-채널 다결정 실리콘 박막 트랜지스터의 Alternate Bias 스트레스 효과
- ㆍ 저자명
- 김영호,조봉희,강동헌,길상근,임석범,임동준
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2001년|14권 11호|pp.869-873 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The effects of alternate bias stress on p-channel poly-Si TFT`s has been systematically investigated. We alternately applied positive and negative bias stress on p-channel poly-Si TFT`s, device Performance(V$\_$th/, g$\_$m/, leakage current, S-slope) are alternately appeared to be increasing and decreasing. It has been shown that device performance degrade under the negative bias stress while improve under the positive bias stress. This effects have been related to the hot carrier injection into the gate oxide rather than the generation of defect states within the poly-Si/SiO$_2$ interface under alternate bias stress.