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Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology
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  • Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology
  • Volumetric Interferometry Using Spherical Wave Interference for Three-dimensional Coordinate Metrology
저자명
Rhee. Hyug-Gyo,Chu. Ji-Young,Kim. Seung-Woo
간행물명
Journal of the Optical Society of Korea
권/호정보
2001년|5권 4호|pp.140-145 (6 pages)
발행정보
한국광학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We present a new method of volumetric interferometer, which is intended to measure the three-dimensional coordinates of a moving object in a simultaneous way with a single optical setup. The method is based on the principles of phase-measuring interferometry with phase shifting. Two diffraction point sources, which are made of the polished ends of single-mode optical fibers are embedded on the object. Two spherical wavefronts emanate from the diffraction point sources and interfere with each other within the measurement volume. One wavefront is phase-shifted by elongating the corresponding fiber using a PZT extender. A CCD array sensor fixed at the stationary measurement station detects the resulting interference field. The measured phases are then related to the three-dimensional location of the object with a set of non-liner equations of Euclidean distance, from which the complete set of three-dimensional spatial coordinates of the object is determined through rigorous numerical computation based upon the least square error minimization.