Recently, ozone is utilized in various fields and its needs are expanding. Therefore, so many ozone generation methods have been reported in the last year, its main purpose is to get the high ozone concentration and to improve the ozone yield one of them is a Co-axial cylinder-type ozonizer. In this paper, a new ozonizer, which is using radio-frequency power supply, is fabricated to investigate discharge characteristics and ozone generation characteristics in accordance wish variation of grip spacing of electrodes.