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A Small Scaling Lateral Trench IGBT with Improved Electrical Characteristics for Smart Power IC
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  • A Small Scaling Lateral Trench IGBT with Improved Electrical Characteristics for Smart Power IC
  • A Small Scaling Lateral Trench IGBT with Improved Electrical Characteristics for Smart Power IC
저자명
Moon. Seung Hyun,Kang. Ey Goo,Sung. Man Young
간행물명
Transactions on electrical and electronic materials
권/호정보
2001년|2권 4호|pp.15-18 (4 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A new small scaling Lateral Trench Insulated Gate Bipolar Transistor (SSLTIGBT) was proposed to improve the characteristics of the device. The entire electrode of the LTIGBT was replaced with a trench-type electrode. The LTIGBT was designed so that the width of device was no more than 10 ${mu}{ extrm}{m}$. The latch-up current densities were improved by 4.5 and 7.6 times, respectively, compared to those of the same sized conventional LTIGBT arid the conventional LTIGBT which has the width of 17 ${mu}{ extrm}{m}$. The enhanced latch-up capability of the SSLTIGBT was obtained due to the fact that the hole current in the device reaches the cathode via the p+ cathode layer underneath the n+ cathode layer, directly. The forward blocking voltage of the SSLTIGBT was 125 V. At the same size, those of the conventional LTIGBT and the conventional LTIGBT with the width of 17 ${mu}{ extrm}{m}$ were 65 V and 105 V, respectively. Because the proposed device was constructed of trench-type electrodes, the electric field In the device were crowded to trench oxide. Thus, the punch through breakdown of LTEIGBT occurred late.