The degradation process of silicone rubber was investigated by leakage current monitoring in Inclined-Plane method. DAS (Data Acquisition System) with 12-bit, 8-channel A/D converter was prepared. Average current, cumulative charge, current waveform and the number of peak pulses were measured on-line. And, FFT (Fast Fourier Transform) analysis was performed with stored current waveform. Besides, maximum erosion depth was measured in order to use as the indicator of the degradation process. So, the results of leakage current components and maximum erosion depth measurements were compared to find one or more components which have trends of changing similarly to that of erosion process. The result suggests that the ratio of peak current to r.m.s. current, harmonic contents and the number of peak pulses are well corresponding with the degradation process.