Two perforated plates are used to investigate local heat/mass transfer characteristics in an impingement/effusion cooling system. A naphthalene sublimation method is conducted to determine the local heat/mass transfer coefficients on the upward facing surface of the effusion plate. Two plates are placed in parallel position with gap distances of 1, 2, 4 and 6 times of effusion hole diameter. The effects of hole arrangements of the plates are studied fur staggered, square, and hexagonal arrays. The experiments are conducted at Reynolds number of 10,000 based on the effusion hole diameter. The results show that the smaller hole size in the staggered array has the higher transfer coefficients on the stagnation region due to the formation of higher momentum flows through the impingement holes. In the square array, heat/mass transfer on the target plate is more uniform as the number of impingement holes increases. High and uniform heat/mass transfer coefficients are obtained for the hexagonal array.