- 비접촉식 4-전극형 전기용량 센서를 이용한 in situ 정밀측정
- ㆍ 저자명
- 김재열,이래덕,박기형,마상동,양동조,Kim. Jae-Yeol,Lee. Lae-Duck,Park. Ki-Hyung,Ma. Sang-Dong,Yang. Dong-Jo
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2002년|19권 3호|pp.33-38 (6 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
To establish the national standard of capacitance, four main electrodes of the cross capacitor which were evaluated to linearity and roundness less the $pm 1 mu m$ respectively have to be adjusted symmetrically in an inner cylinder. Four LM shafts with diameter of 5 mm were installed between main electrodes of the cross capacitor, and the electrodes were adjusted, as the first step, by means of the measured capacitance. In the second step, the symmetrical adjustment up to $pm 1.2mu m$ was performed by using a ball sensor, ball-type movable sensor, non-contacting capacitive sensor and upper guard sensor which were developed in this project.